Nanoelectromechanical systems (
NEMS) are a class of devices integrating electrical and mechanical functionality on the
nanoscale. NEMS form the logical next miniaturization step from so-called
microelectromechanical systems, or MEMS devices. NEMS typically integrate transistor-like
nanoelectronics with mechanical actuators, pumps, or motors, and may thereby form physical, biological, and
chemical sensors. The name derives from typical device dimensions in the
nanometer range, leading to low mass, high mechanical resonance frequencies, potentially large
quantum mechanical effects such as
zero point motion, and a high surface-to-volume ratio useful for surface-based sensing mechanisms. Uses include
accelerometers, or detectors of
chemical substances in the air.