Microelectromechanical systems (
MEMS, also written as
micro-electro-mechanical,
MicroElectroMechanical or
microelectronic and microelectromechanical systems and the related
micromechatronics) is the technology of very small devices; it merges at the nano-scale into
nanoelectromechanical systems (NEMS) and
nanotechnology. MEMS are also referred to as
micromachines in Japan, or
micro systems technology (
MST) in Europe.