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molecular beam epitaxy
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Molecular beam epitaxy
Molecular beam epitaxy
(
MBE
) is an
epitaxy
method for
thin-film deposition
of
single crystals
. It was invented in the late 1960s at
Bell Telephone Laboratories
by J. R. Arthur and
Alfred Y. Cho
. MBE is widely used in the manufacture of semiconductor devices, including
transistors
for cellular phones and
WiFi
.
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